Last edited by Faetilar
Saturday, August 1, 2020 | History

3 edition of Assessing and characterizing inter- and intra-die variation using a statistical metrology framework found in the catalog.

Assessing and characterizing inter- and intra-die variation using a statistical metrology framework

Assessing and characterizing inter- and intra-die variation using a statistical metrology framework

a CMP case study

  • 25 Want to read
  • 19 Currently reading

Published by Hewlett-Packard Laboratories, Technical Publications Dept. in Palo Alto, Calif .
Written in English

    Subjects:
  • Statistics,
  • Metals -- Pickling

  • Edition Notes

    StatementR. Divecha ... [et al.].
    SeriesHP Laboratories technical report -- HPL-96-78.
    ContributionsDivecha, R., Hewlett-Packard Laboratories.
    The Physical Object
    Pagination[2] p. :
    ID Numbers
    Open LibraryOL17597987M
    OCLC/WorldCa43731366


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